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Formulating an Ideal Protein Photoresist for Fabricating Dynamic Microstructures with High Aspect Ratios and Uniform Responsiveness

机译:配制理想的蛋白光致抗蚀剂,以制造具有高纵横比和均匀响应性的动态微结构

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The physical properties of aqueous-based stimuli-responsive photoresists are crucial in fabricating microstructures with high structural integrity and uniform responsiveness during two-photon lithography. Here, we quantitatively investigate how various components within bovine serum albumin (BSA) photoresists, affect our ability to achieve BSA microstructures with consistent stimuli-responsive properties,over areas exceeding 10(4) mu m(2). We unveil a relationship between BSA concentration and dynamic viscosity, establishing a threshold viscosity to achieve robust BSA microstructures. We also demonstrate the addition of an inert polymer to the photoresist as viscosity enhancer. A set of systematically optimized processing parameters is derived for the construction of dynamic BSA microstructures. The optimized BSA photoresists and processing parameters enable us to extend the two-dimensional (2D) microstructures to three-dimensional (3D) ones, culminating in arrays of micropillars with aspect ratio >10. Our findings foster the development of liquid stimuli responsive photoresists to build multifunctional complex 3D geometries for applications such as bioimplaritable devices or adaptive photonic systems.
机译:水基刺激响应性光致抗蚀剂的物理性质对于在双光子光刻过程中制造具有高结构完整性和均匀响应性的微结构至关重要。在这里,我们定量研究牛血清白蛋白(BSA)光刻胶中的各种成分如何影响我们在超过10(4)μm(2)的面积上实现具有一致的刺激响应特性的BSA微结构的能力。我们揭示了BSA浓度与动态粘度之间的关系,建立了阈值粘度以实现坚固的BSA微观结构。我们还证明了向光致抗蚀剂中添加惰性聚合物作为增粘剂。导出了一组系统优化的加工参数,用于构造动态BSA微结构。优化的BSA光致抗蚀剂和加工参数使我们能够将二维(2D)微结构扩展到三维(3D)微结构,最终形成纵横比> 10的微柱阵列。我们的发现促进了液体刺激响应性光致抗蚀剂的发展,以建立多功能复杂的3D几何形状,以用于诸如生物不可植入设备或自适应光子系统之类的应用。

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