Magnetic recovery method of magnetically responsive high-aspect ratio photoresist microstructures

摘要

Systems and methods that facilitate magnetic collection and/or manipulation of individual micropallets are provided. The embodiments provided herein are directed to a new method for collecting micropallets once released from a substrate. It is accomplished by endowing the micropallets with magnetic properties by incorporating ferromagnetic or superparamagnetic nanoparticles into the photoresist material or otherwise incorporating magnetically responsive material into the micropallet structure. The magnetic particles, which posses magnetic qualities, e.g., ferromagnetism, ferrimagnetism, paramagnetism, and are composed of iron, nickel, and/or other magnetic materials, are mixed into the bulk photoresist prior to its use in the fabrication of microstructures. Also covered are other methods of incorporating magnetically-attractable material into the micropallet structure, such as plating of the micropallets with a material that is magnetically responsive, such as nickel. Additionally, the embodiments provided include a “collection probe” that is used to collect the released magnetic micropallets.