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Degradation and Characterization of Resorbable Phosphate-Based Glass Thin-Film Coatings Applied by Radio-Frequency Magnetron Sputtering

机译:射频磁控溅射可降解磷酸盐基玻璃薄膜涂层的降解与表征

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Quinternary phosphate-based glasses of up to 2.67 mu m, deposited by radio-frequency magnetron sputtering, were degraded in distilled water and phosphate-buffered saline (PBS) to investigate their degradation characteristics. Magnetron-sputtered coatings have been structurally compared to their compositionally equivalent melt-quenched bulk glass counterparts. The coatings were found to have structurally variable surfaces to melt-quenched glass such that the respective bridging oxygen to nonbridging oxygen bonds were 34.2% to 65.8% versus 20.5% to 79.5%, forming metaphosphate (PO3)(-) (Q(2)) versus less soluble (P2O7)(4-) (Q) and (PO4)(3-) (Q(0)), respectively. This factor led to highly soluble coatings, exhibiting a t(1/2) degradation dependence in the first 2 h in distilled water, followed by a more characteristic linear profile because the subsequent layers were less soluble. Degradation was observed to preferentially occur, forming voids characteristic of pitting corrosion, which was confirmed by the use of a focused ion beam. Coating degradation in PBS precipitated a (PO3)(-) metaphosphate, an X-ray amorphous layer, which remained adherent to the substrate and seemingly formed a protective diffusion barrier, which inhibited further coating degradation. The implications are that while compositionally similar, sputter-deposited coatings and melt-quenched glasses are structurally dissimilar, most notably, with regard to the surface layer. This factor has been attributed to surface etching of the as-deposited coating layer during deposition and variation in the thermal history between the processes of magnetron sputtering and melt quenching.
机译:通过射频磁控溅射沉积的高达2.67微米的磷酸季铵盐玻璃在蒸馏水和磷酸盐缓冲盐水(PBS)中降解,以研究其降解特性。磁控溅射镀膜在结构上与等效的熔融淬火块状玻璃对应物进行了比较。发现该涂层的表面具有可变结构,可熔融淬火玻璃,从而使桥接氧键与非桥接氧键的比例分别为34.2%至65.8%和20.5%至79.5%,形成偏磷酸盐(PO3)(-)(Q(2) )与溶解度较低的(P2O7)(4-)(Q)和(PO4)(3-)(Q(0))分别对应。这个因素导致了涂料的高度可溶性,在蒸馏水中的前2 h表现出t(1/2)降解依赖性,其次是线性特征,因为后续层的溶解性较差。观察到优先发生降解,形成点蚀腐蚀的空隙,这通过使用聚焦离子束得到证实。 PBS中的涂层降解会沉淀出(PO3)(-)偏磷酸盐(X射线无定形层),该涂层仍粘附在基材上,似乎形成了保护性扩散屏障,从而抑制了涂层的进一步降解。其含义是,尽管在成分上相似,但是溅射沉积的涂层和熔融淬火玻璃在结构上是不同的,最明显的是在表面层方面。该因素归因于沉积期间沉积的涂层的表面蚀刻以及磁控溅射和熔融淬火过程之间的热历史变化。

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