Decomposition processes of H3NBH3 (borazane), (BH)(3)(NH)(3) (borazine), and B(CH3)(3) (trimethylboron) on heated W wire surfaces

摘要

The decomposition mechanisms of H3NBH3, (BH)(3)(NH)(3), and B(CH3)(3) on heated W wire surfaces were examined using mass spectrometric and laser spectroscopic techniques. These chemicals can be source materials for catalytic chemical vapor deposition as well as for B-atom doping. All the species could be decomposed well when the wire temperature was over 2.0 x 10(3) K. When H-2 was introduced, the production of B atoms was confirmed in the decomposition of H3NBH3 and B(CH3)(3), but not for (BH)(3)(NH)(3). H3NBH3 and B(CH3)(3) may be candidates as safe precursors for B-atom doping, while (BH)(3)(NH)(3) could be a viable candidate as aBN film precursor. (C) 2015 Elsevier B.V. All rights reserved.