Micro-fabrication technique of single crystal silicon by using combination of nano-scale machining and alkaline etching

Noboru Morita

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Micro-fabrication technique of single crystal silicon by using combination of nano-scale machining and alkaline etching

机译：纳米加工与碱蚀相结合的单晶硅微细加工技术

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来源
《砥粒加工学会誌》 |2001年第6期|共4页
作者
Noboru Morita;
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原文格式 PDF
正文语种 jpn
中图分类磨削加工与磨床;
关键词
Micro-fabrication; Single crystal silicon; Nano-scale machining; Alkaline etching; Friction force microscope;

机译：微细加工;单晶硅;纳米加工;碱蚀;摩擦力显微镜;

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专利

1. Micro-fabrication technique of single crystal silicon by using combination of nano-scale machining and alkaline etching [J] . Noboru Morita 砥粒加工学会誌 . 2001,第6期

机译：纳米加工与碱蚀相结合的单晶硅微细加工技术
2. Effect of Alkaline pH on Polishing and Etching of Single and Polycrystalline Silicon [J] . R. Prasanna Venkatesh, Y. Nagendra Prasad, Tae-Young Kwon, Japanese journal of applied physics . 2012,第7ISSUE1期

机译：碱性pH值对单晶硅和多晶硅抛光和蚀刻的影响
3. Patterning on single crystalline silicon by laser scanning and alkaline etching [J] . Takashi Hosono, Hitoshi Tokura Applied Surface Science . 2009,第15期

机译：通过激光扫描和碱蚀刻在单晶硅上构图
4. New Maskless Micro-Fabrication Technique of Single-crystal Silicon using the Combination of Nanometer-scale Machining and Wet Etching [C] . K. Ashida, L. Chen, N. Morita 2nd International EUSPEN Conference on Precision Engineering Nanotechnology Vol.1, May 27th-31st, 2001, Turin, Italy . 2001

机译：纳米加工与湿法刻蚀相结合的单晶硅无掩模微细加工新技术
5. Growth and high rate reactive ion etching of epitaxially grown barium hexaferrite films on single crystal silicon carbide substrates. [D] . Chen, Zhaohui. 2009

机译：在单晶碳化硅衬底上外延生长的六价铁酸钡薄膜的生长和高速率反应离子刻蚀。
6. Improvement of polycrystalline silicon wafer solar cell efficiency by forming nanoscale pyramids on wafer surface using a self-mask etching technique [O] . Hsin-Han Lin, Wen-Hwa Chen, Franklin C.-N. Hong -1

机译：通过使用自掩膜蚀刻技术在晶圆表面形成纳米级金字塔提高多晶硅晶圆太阳能电池效率
7. Micro-Fabrication of Single Crystal Silicon by Using Combination Technique of Nano-scale Machining and Alkaline Etching. [O] . Liyi CHEN, Noboru MORITA, Kiwamu ASHIDA 2001

机译：采用纳米级加工和碱蚀刻的组合技术微晶硅的微制造。

Micro-fabrication technique of single crystal silicon by using combination of nano-scale machining and alkaline etching

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