Preparation and dielectric properties of the multilayer capacitor with (Ba,Sr) TiO{sub}3 thin layers by metalorganic chemical vapor deposition

Yutaka Takeshima; Yukio Sakabe

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Preparation and dielectric properties of the multilayer capacitor with (Ba,Sr) TiO{sub}3 thin layers by metalorganic chemical vapor deposition

机译：金属有机化学气相沉积法制备（Ba，Sr）TiO {sub} 3薄膜多层电容器的介电性能

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来源
《ニュ-セラミックス》 |1998年第6期|共6页
作者
Yutaka Takeshima; Yukio Sakabe;
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中图分类硅酸盐工业;
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1. Preparation and dielectric properties of the multilayer capacitor with (Ba,Sr) TiO{sub}3 thin layers by metalorganic chemical vapor deposition [J] . Yutaka Takeshima, Yukio Sakabe ニュ-セラミックス . 1998,第6期

机译：金属有机化学气相沉积法制备（Ba，Sr）TiO {sub} 3薄膜多层电容器的介电性能
2. Preparation and dielectric properties of the multilayer capacitor with (Ba,Sr) TiO{sub}3 thin layers by metalorganic chemical vapor deposition [J] . Yutaka Takeshima, Yukio Sakabe ニュ-セラミックス . 1998,第6期

机译：金属有机化学气相沉积法制备（Ba，Sr）TiO {sub} 3薄膜多层电容器的介电性能
3. Preparation and dielectric properties of the multilayer capacitor with (Ba,Sr) TiO{sub}3 thin layers by metalorganic chemical vapor deposition [J] . Yutaka Takeshima, Yukio Sakabe ニュ-セラミックス . 1998,第6期

机译：用（Ba，SR）TiO {Sub} 3薄层的多层电容器的制备和介电性能通过金属化学气相沉积
4. Dielectric properties of (Ba,Sr)TiO/sub 3/ thin films deposited on Ni/TiN/Si substrate by photo-assisted metal organic chemical vapor deposition [C] . Chen, Y.M., Ritums, . 1998

机译：通过光辅助金属有机化学气相沉积法在Ni / TiN / Si衬底上沉积（Ba，Sr）TiO / sub 3 /薄膜的介电性能
5. Structural, dielectric, and optical properties of potassium tantalate niobate thin films prepared by metalorganic chemical vapor deposition [D] . Nichols, Barbara Michelle. 2000

机译：金属有机化学气相沉积法制备钽酸钽铌酸钾薄膜的结构，介电和光学性质
6. NO gas sensor based on ZnGa2O4 epilayer grown by metalorganic chemical vapor deposition [O] . Min-Ru Wu, Wei-Zhong Li, Chun-Yi Tung, -1

机译：金属有机化学气相沉积生长基于ZnGa2O4外延层的NO气体传感器
7. Structural and optical properties of 3D growth multilayer InGaN/GaN quantum dots by metalorganic chemical vapor deposition [O] . Han XX, Chen Z, Li DB, 2004

机译：金属有机化学气相沉积法制备3D生长多层InGaN / GaN量子点的结构和光学性质

Preparation and dielectric properties of the multilayer capacitor with (Ba,Sr) TiO{sub}3 thin layers by metalorganic chemical vapor deposition

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