Influences of Electrode Junctions on Scanning Capacitance Microscopy

摘要

In this article, we introduce the influences of electrode junctions on scanning capacitance microscopy (SCM). Differential capacitance signals of scanning capacitance microscopy are very sensitive to the electrode junctions of an SCM specimen. For the contact point of the conductive probe, UV illumination reduced defects of the native oxide layer on sample surface and obviously enhanced the signal intensity of SCM. For the image analysis of a specimen with P-N junctions, the sample electrode setup is very important to the contrast and the accuracy of differential capacitance images. The sample electrode contact with both n- and p-type regions provides reliable differential capacitance images.