Determination of the Surface Roughness of the Diamond-Like Films by the Method of Low-Voltage Transmitting Electron Microscopy

Yu. F. Shchetnev; E. V. Kichenko; E. M. Belavtseva

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Determination of the Surface Roughness of the Diamond-Like Films by the Method of Low-Voltage Transmitting Electron Microscopy

机译：低压透射电子显微镜法测定类金刚石薄膜的表面粗糙度

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摘要

A method for the determination of the surface roughness of the diamond-like films using low-voltage transmitting electron microscopy is proposed. The method is based on measuring the opacity of the negatives and subsequent mathematical processing of the data obtained.

机译：提出了一种利用低压透射电子显微镜确定类金刚石膜表面粗糙度的方法。该方法基于测量负片的不透明度和随后对获得的数据进行数学处理。

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《Заводская лаборатория: Ежемес.науч.-техн. журн. по аналит. химии, физ., мат. и мех. методам исслед. материалов 》 |1996年第5期| 共3页
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Yu. F. Shchetnev; E. V. Kichenko; E. M. Belavtseva;
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中图分类分析化学 ;
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3. Determination of the Surface Roughness of the Diamond-Like Films by the Method of Low-Voltage Transmitting Electron Microscopy [J] . Yu. F. Shchetnev, E. V. Kichenko, E. M. Belavtseva Заводская лаборатория: Ежемес.науч.-техн. журн. по аналит. химии, физ., мат. и мех. методам исслед. материалов . 1996 ,第5期

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Determination of the Surface Roughness of the Diamond-Like Films by the Method of Low-Voltage Transmitting Electron Microscopy

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