FEM simulation of trident-type tuning fork resonator characteristics for application to L{sub}1-F{sub}2 mode piezoelectric actuator

摘要

When an piezoelectric vibrator is used as a linear actuator, unstable condition of piezoelectric stator vibrator becomes a serious problem. So, we thought about application of a trident-type tuning fork resonator to the linear actuator taking into account that it had a good support characteristic in its low frequency use and by this reason, it was used as a gyro-sensor and so on before. In other words, it is our purpose that we use a little displacement in the bottom part of the resonator and we perform a stable support when pressing it to the slider. That is, this paper reports FEM simulation result of trident-type tuning fork resonator characteristics for application to L{sub}1 -F{sub}2 mode tuning fork type linear actuator.