Processing and characterization of sol-gel deposited (100)-oriented CSBTi thick films on Pt (111)/Ti/SiO2/Si (100) substrate

摘要

Predominantly (100)-oriented Ca0.4Sr0.6Bi4Ti4O15 (CSBTi) thick films were deposited on Pt (111)/Ti/SiO2/Si substrates using a novel powder-gel method combined with annealed procedure. In this method, surface-modified fine CSBTi crystalline particles are well dispersed in a sol-gel precursor solution to have an uniform slurry which is then spin-coated onto a substrate. The thick films were then annealed at 750 degrees C for the annealing times ranging from 0 h to 4 h. The film annealed for 2 h exhibits a well saturated hysteresis loop with a remanent polarization (P-r) of 28.7 mu C/cm(2), much larger than the reported values Furthermore, no discernible fatigue effect can be observed after 10(10) switching cycles.