Design and Simulation of MEMS based Piezoelectric Pressure Sensor using COMSOL

摘要

MEMS pressure sensors have been widely used in automobiles, airplanes, submarines, and biomedical devices. For some special applications such as aerospace and underground oil exploration, pressure sensors which can endure extremely high temperature are required. In this article, the design of a silicon-carbide based MEMS pressure sensor for high temperature applications is developed. The thus developed MEMS pressure sensor is based on Si-SiC-Si compound structure. This device model is designed by using COMSOL Multiphysics 4.3b Software.