Characteristics of thick film resistors embedded in low temperature co-fired ceramic (LTCC) substrates

摘要

Commercial thick film resistors were embedded in low temperature co-fired ceramic (LTCC) substrates, and co-fired with substrates at temperatures between 800 and 900 deg C. Adding glass frit and amorphous SiO_2 to calcium borosilicate glass ceramic substrates has not only lowered the shrinkage of the substrates, but also improved adhesion and maintained structure integrity of the resistor films. During sintering, the conductive phase particles in the resistor became agglomerated and sedimented, and glass diffused into the LTCC substrate layer. Increasing the dwelling time, the overall resistivity of the co-fired films decreased due to sedimentation of agglomerated conductive particles. The liquid eutectic phases penetrated into the substrates added with either SiO_2 or glass frit that the volume fraction of conductive particles was increased. The resistivity of the embedded resistors was determined by the volume fraction of conductive particles, which was influenced by the conductive particles sedimentation, microstructure of resistor films, and inter-diffusion between the resistors and substrates.