首页> 外文期刊>Journal of Photochemistry and Photobiology, A. Chemistry >Photothermal conversion dynamics in femtosecond and picosecond discrete laser etching of CU-phthalocyanine amorphous film analysed by ultrafast UV-VIS absorption spectroscopy
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Photothermal conversion dynamics in femtosecond and picosecond discrete laser etching of CU-phthalocyanine amorphous film analysed by ultrafast UV-VIS absorption spectroscopy

机译:飞秒和皮秒离散激光蚀刻CU-酞菁非晶膜的光热转换动力学的超快UV-VIS吸收光谱分析

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摘要

Novel etching of Cu-phthalocyanine (CuPc) amorphous film which is characteristic of ultrashort laser irradiation was successfully confirmed by tuning Ti:Sapphire laser (780 nm) to 150 fs, 250 ps, or 100 ns, and the primary processes were investigated by fs pump-fs probe and ps pump-fs probe spectroscopic measurements. In the fs and ps laser ablation, we have found discrete laser etching in that the etch depth becomes constant and is independent of laser fluence above the ablation, we have found discrete laser etching in that the etch depth becomes constant and is independent of laser fluence above the ablation threshold, although gradual (normal) etching, in which the etch depth increase continuously with the fluence above ablation threshold, was observed inthe ns laser ablation. The transient absorption spectral measurements reveal the nonlinear photothermal conversion processes, corresponding to exciton-exciton annihilation and cyclic multiphotonic absorption. Their time evolutions during and after the excitation pulse duration were considered and elucidated to depend strongly on the excitation pulse width. On the basis of these results, we discuss an ablation mechanism for the ps and fs ablation that the temperature elevation bringing about transient high pressure is responsible for discrete etching.
机译:通过将Ti:Sapphire激光器(780 nm)调整为150 fs,250 ps或100 ns成功地证实了具有超短激光辐照特性的新型铜-酞菁(CuPc)非晶膜刻蚀工艺,并通过fs研究了主要工艺pump-fs探针和ps pump-fs探针光谱测量。在fs和ps激光烧蚀中,我们发现离散的激光蚀刻是因为蚀刻深度变得恒定,并且与烧蚀上方的激光通量无关;我们发现了离散的激光蚀刻,因为蚀刻深度变得恒定并且与激光通量无关。虽然在ns激光烧蚀中观察到了逐渐增大(正常)的蚀刻,其中蚀刻深度随着通量高于烧蚀阈值而连续增加,但是在高于烧蚀阈值的情况下,观察到。瞬态吸收光谱测量揭示了非线性光热转换过程,对应于激子-激子an灭和循环多光子吸收。考虑并阐明了它们在激励脉冲持续时间期间和之后的时间演变,在很大程度上取决于激励脉冲宽度。在这些结果的基础上,我们讨论了ps和fs烧蚀的烧蚀机理,即引起瞬时高压的温度升高是离散蚀刻的原因。

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