Energy Filtration of Secondary and Backscattered Electrons by the Method of the Retarding Potential in Scanning Electron and Ion Microscopy

摘要

Data for the study of various contrasts in the methods of scanning electron and ion microscopy with the energy filtration of signals from secondary and reflected electrons are presented. A model of the formation of contrast by secondary electrons in a helium scanning electron microscope is formulated. The possibility of contrast amplification via energy filtration in a helium ion microscope as well as the chance of recording reflected ions by means of secondary electron detection is demonstrated. The recorded data for the material contrast in low-voltage electron microscopy at various acceleration voltages and different modes of energy filtration are given. The possibility of enhancing or reducing material contrast by means of energy filtration is shown.