Surface damages on single-crystal silicon during irradiation by a powerful ion beam

摘要

Damages on single-crystal silicon under the action of a powerful proton-carbon beam of nanosecond duration have been studied. The formation of various surface structures at a beam current density of less than 100 A/cm ~2 has been observed. The morphological features of these structures have been described and the effect of natural dioxide silicon on their formation has been considered.