Investigation of silicon structures with periodically varying porosity by X-ray diffractometry methods

摘要

The features of formation of silicon structures with a periodically varying porosity are investigated by X-ray diffractometry. It is revealed that the magnitude of anode current density corresponding to the formation of a layer with higher porosity that is part of a multilayer porous structure also affects the porosity of a second, less porous layer. As time elapses, the single-crystalline matrix of which porous layers consist is amorphized and a structure consisting of amorphous layers with a periodically varying density arises.