Three-layer tri-wavelength broadband antireflective coatings built from refractive indices controlled silica thin films

摘要

A three-layer tri-wavelength broadband antireflective (AR) coating with 100 % transmittance simultaneously at 1064, 532 and 355 nm was designed using TFCalc (TM) thin film design software. The refractive indices for the bottom, middle and top layers of the designed AR coating are 1.33, 1.21 and 1.10, respectively. To realize the designed AR coating, a template-free sol-gel process was proposed to regulate the refractive index of silica film from 1.09 to 1.44 by simple hybridization. Silica films with refractive index of 1.21-1.44 were prepared by the hybridization of acid-catalyzed silica and base-catalyzed silica, while organically modified silicates films with refractive index of 1.09-1.21 were prepared by the hybridization of tetraethoxysilane, methyltriethoxysilane and hexamethyldisilazane under base-catalyzed condition. These two hybridization methods could conveniently control the porosity, and hence the refractive index of films. Finally, the three-layer tri-wavelength broadband AR coating, which is very important in high-power laser systems, was realized with the transmittance of 99.9, 99.8 and 99.4 % at 1064, 532 and 355 nm, respectively.