Hybrid particle-in-cell (PIC) ions and Boltzmann electron distribution simulation of direct-current plasma immersion ion implantation into three-dimensional objects

摘要

A hybrid protocol including particle-in-cell (PIC) ions and Boltzmann electron distribution is developed to simulate plasma immersion ion implantation (PIII) into an S-shaped bar inside a grounded cylindrical cage consisting of a mesh. A multiple-grid system with three cell confinements is adopted to achieve sufficient accuracy and acceptable computational time. The simulation results reveal that the implantation fluence distribution along the major curvature is more uniform than that obtained by conventional PIII.