Optical emission spectroscopy in low-temperature plasmas containing argon and nitrogen: Determination of the electron temperature and density by the line-ratio method

摘要

This article reviews a variety of methods to obtain the electron temperature and density by the emission line ratios for low-temperature plasmas containing argon or nitrogen gas. Based on the collisional-radiative model of excited particles, the underlying principle of each of these methods is described, along with the criterion on how to select an appropriate line-ratio method according to the discharge conditions. Limitations on the application of each line-ratio technique are also discussed.