Isotropic pyrocarbon deposited at 1250 degrees C by means of thermal gradient chemical vapor deposition

摘要

Isotropic pyrocarbon was fabricated at 1250 degrees C via thermal gradient chemical vapor deposition. The density of the deposit was measured using Archimedes methods and the microstructure was examined by polarized light microscope and scanning electron microscope. The results showed that the density of the deposit was about 1.85 g/cm(3) and it was constituted of spherical pyrocarbon grains which was about 0.6-0.8 mu m in diameter and compacted densely and there are some microcracks in the deposit. Crown Copyright