首页> 外文期刊>Journal of optics, A. Pure and applied optics: journal of the European Optical Society >Organic amorphous fluoropolymer membrane for variable optical attenuator applications
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Organic amorphous fluoropolymer membrane for variable optical attenuator applications

机译:用于可变光衰减器应用的有机非晶态含氟聚合物膜

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摘要

The paper describes the design, fabrication and testing of a MEMS (micro-electro-mechanical systems) variable optical attenuator (VOA) made from an organic fluoropolymer thin film. The optical attenuation is achieved by changing the radius of curvature of the organic thin film by actuating a pneumatic force. The size of the organic polymer membrane is 4 mm x 4 mm and the measured centre displacement of the organic membrane is as large as 57 mu m without any plastic deformation. The mechanical deformation of the fluoropolymer membrane can be simulated by finite element method (FEM) and the optical coupling efficiency is calculated based on the coherent optical transfer function (OTF) of the deformed membrane. The experimental results show that the attenuation range can achieve 25 dB at the wavelength of 1550 nm, which agrees well with the theoretical calculation. The measured wavelength dependence loss is less than 0.5 dB.
机译:本文描述了由有机含氟聚合物薄膜制成的MEMS(微机电系统)可变光衰减器(VOA)的设计,制造和测试。通过致动气压来改变有机薄膜的曲率半径来实现光衰减。有机聚合物膜的尺寸为4mm×4mm,并且所测量的有机膜的中心位移大至57μm,而没有任何塑性变形。可以通过有限元方法(FEM)模拟含氟聚合物膜的机械变形,并基于变形膜的相干光学传递函数(OTF)计算光耦合效率。实验结果表明,在1550 nm波长处,衰减范围可以达到25 dB,与理论计算吻合良好。测得的波长依赖性损耗小于0.5 dB。

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