A low-temperature polycrystalline-silicon thin-film transistor micro-manipulation array with indium tin oxide micro-coils and real-time detection

摘要

This study proposes an array for a bio-handling system consisting of microcoils on top of photodetectors fabricated by low-temperature polycrystalline-silicon thin-film transistor (LTPS-TFT) technology on a glass substrate. Using magnetic beads as the medium, the proposed system can simultaneously monitor and manipulate micrometer-sized bio-samples. In a manipulation system based on magnetic force, photo-detecting is a reliable method, immune to the interference caused by electromagnetic fields. Under 480 lux ambient white light, the sensor can detect a microbead as small as 23 μm in diameter with detectable output difference. It provides a new, easier way for handling samples on a small chip.