Prototyping of a highly performant and integrated piezoresistive force sensor for microscale applications

摘要

In this paper, the prototyping of a new piezoresistive microforce sensor is presented. An original design taking advantage of both the mechanical and bulk piezoresistive properties of silicon is presented, which enables the easy fabrication of a very small, large-range, high-sensitivity with high integration potential sensor. The sensor is made of two silicon strain gauges for which widespread and known microfabrication processes are used. The strain gauges present a high gauge factor which allows a good sensitivity of this force sensor. The dimensions of this sensor are 700 μm in length, 100 μm in width and 12 μm in thickness. These dimensions make its use convenient with many microscale applications, notably its integration in a microgripper. The fabricated sensor is calibrated using an industrial force sensor. The design, microfabrication process and performances of the fabricated piezoresistive force sensor are innovative thanks to its resolution of 100 nN and its measurement range of 2 mN. This force sensor also presents a high signal-to-noise ratio, typically 50 dB when a 2 mN force is applied at the tip of the force sensor.