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首页> 外文期刊>Journal of Micromechanics and Microengineering >Construction and actuation of a microscopic gear assembly formed using optical tweezers
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Construction and actuation of a microscopic gear assembly formed using optical tweezers

机译:使用光镊形成的微型齿轮组件的构造和驱动

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摘要

The assembly of micrometer-sized parts is an important manufacturing process; any development in it could potentially change the current manufacturing practices for micrometer-scale devices. Due to the lack of reliable microassembly techniques, these devices are often manufactured using silicon, which includes etching and depositions with little use of assembly processes. The result is the requirement of specialized manufacturing conditions with hazardous byproducts and limited applications where only simple mechanisms are allowed. Optical tweezers are non-contact type manipulators that are very suitable for assembling microparts and solve one of the most difficult problems for microassembly, which is the sticking of the physical manipulator to the micropart. Although contact type manipulators can be surface modified to be non-sticky, this involves extra preprocessing - optical tweezers do not require such additional efforts. The weakness of using optical tweezers is that the permanent assembly of parts is not possible as only very small forces can be applied. We introduce an advanced microassembly environment with the combined use of optical tweezers and a motorized microtip, where the former is used to position two parts and the latter is used to introduce deformation in the parts so that they form a strongly fitted assembly.
机译:微米级零件的组装是重要的制造过程。它的任何发展都可能改变当前微米级设备的制造惯例。由于缺乏可靠的微装配技术,这些设备通常使用硅制造,包括蚀刻和沉积,很少使用装配工艺。结果是需要特殊的制造条件以及有害的副产品,并且只能使用简单的机构来限制应用。光学镊子是非接触式操纵器,非常适合于组装微型零件,并解决了微型装配最困难的问题之一,这是物理操纵器对微型零件的粘附。尽管可以将接触型机械手表面改性为不粘手,但这需要额外的预处理-光镊不需要这种额外的工作。使用光镊的缺点是部件不可能永久组装,因为只能施加很小的力。我们引入了一种结合了光镊和电动微尖端的先进微装配环境,其中前者用于放置两个零件,而后者则用于在零件中引入变形,从而形成牢固装配的组件。

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