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首页> 外文期刊>Journal of Micromechanics and Microengineering >Process characterization for direct dispense fabrication of polymer optical multi-mode waveguides
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Process characterization for direct dispense fabrication of polymer optical multi-mode waveguides

机译:直接分配制造聚合物光学多模波导的工艺表征

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摘要

The use of optical waveguide technology in printed circuit boards offers improvement in high speed data transfer. Transitioning current material deposition techniques for waveguide fabrication from small scale laboratory environments to large scale manufacturing presents significant physical and financial challenges. To address these issues, a syringe based direct dispense tool was characterized for repeatable direct write dispensing of blanket layers of waveguide material over a range of thicknesses (25-220 μm), reducing waste material and affording the ability to utilize large substrates. This tool was also used to directly dispense discrete multimode waveguide cores requiring no UV definition or chemical development. The ability to directly dispense waveguides reduces production costs by eliminating material waste and the need for costly photo-masks. The direct dispense waveguide cores had near circular cross sections ~50 μm in diameter, with total optical losses in the range of 0.06-0.09 dB cm~(-1) at 850 nm compared to <0.05 dB cm~(-1) losses of lithographically fabricated square waveguides. The most critical process variables for dispensing functioning polymer waveguides are identified and discussed.
机译:在印刷电路板中使用光波导技术可改善高速数据传输。当前用于波导制造的材料沉积技术从小规模实验室环境向大规模制造的过渡提出了重大的物理和财务挑战。为了解决这些问题,基于注射器的直接分配工具的特征在于,可在厚度范围(25-220μm)范围内对波导材料的覆盖层进行可重复的直接写入分配,从而减少了浪费的材料并提供了利用大型基板的能力。该工具还用于直接分配不需要紫外线或化学显影的离散多模波导芯。通过消除材料浪费和对昂贵的光掩模的需求,直接分配波导的能力降低了生产成本。直接分配波导芯的直径接近50μm,接近圆形截面,在850 nm处的总光损耗在0.06-0.09 dB cm〜(-1)范围内,而损耗小于<0.05 dB cm〜(-1)。光刻制造的方形波导。确定并讨论了分配功能性聚合物波导的最关键的过程变量。

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