Design, fabrication and application of an SOI-based resonant electric field microsensor with coplanar comb-shaped electrodes

摘要

This paper presents a highly sensitive resonant electric field microsensor based on silicon on insulator (SOI) technology. To improve the electric field coupling effect, the microsensor uses coplanar shutter electrodes and sense electrodes. To obtain higher conversion gain, both electrodes adopt novel comb-shaped structures. A finite element method (FEM) was used to simulate and optimize the structures of the comb-shaped electrodes. The sensitivity model of the microsensor was analyzed by the conversion gain of the vibration-amplitude-to-charge variation. The resolution of the microsensor is approximately 40 V m~(-1) with an uncertainty of 1% for the dc field, while the resolution is better than 10 V m~(-1) for the 50 Hz ac field. The microsensors were packaged and assembled to form an electric field probe to measure the atmospheric electric field. The test results showed that the probe precisely detected the occurrence of thunderstorms, and the plotted data agreed well with those of the conventional electric field mill.