CMOS integrated pressure sensor optimization using electrical network simulator-FEM tool coupling

摘要

The electrical network simulator HSPICE and the FEM (finite element method) program ANSYS were coupled. The coupled programs can be used for the effective design of many types of microsystem. The coupling permits the optimization of geometrical, mechanical or electrical design parameters of a monolithically integrated sensor at the same time. For the demonstration of the usefulness of the coupling, a gauge pressure sensor fabricated with an on-chip integrated VCO (voltage controlled oscillator) was simulated and the design was optimized using ANSYS optimization tools.