In-plane rotary comb-drives suspended by serpentine flexures were demonstrated to achieve larger rotation angles than those suspended by clamped straight beams. The serpentine flexures enabled the in-plane rotary comb-drives to mechanically rotate over 9degrees in each angular direction at driving voltage bias of less than 60 V. The resonant frequencies of such devices were measured to be about 410 Hz. The devices under test were made of single-crystal silicon and had dimensions of about 1 mm x 1 mm. These large stable rotation angles at lower driving voltages were designed based on the principle of radial instability.
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机译：蛇形弯曲悬挂的平面内旋转梳状驱动器的旋转角度要比夹紧直梁悬挂的旋转梳齿驱动器大。蛇形弯曲使得平面内旋转梳齿驱动器能够在小于60 V的驱动电压偏置下沿每个角度方向机械旋转9度。这种设备的谐振频率测得约为410 Hz。被测器件由单晶硅制成，尺寸约为1 mm x 1 mm。这些较低的驱动电压下的大稳定旋转角是根据径向不稳定性原理设计的。
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