A new planar micro electrothermal actuator capable of bidirectional rotation is presented. The ring thermal actuator has a wheel-like geometry with eight arms connecting an outer ring to a central hub. Thermal expansion of the arms results in a rotation of the outer ring about its center. An analytical model is developed for the electrothermal and thermal-mechanical aspects of the actuator's operation. Finite element analysis is used to validate the analytic study. The actuator has been fabricated using the multi-user MEMS process and experimental displacement results are compared with model predictions. Experiments show a possible displacement of 7.4 mu m in each direction. Also, by switching the current between the arms it is possible to achieve an oscillating motion.
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