Development of a micro-thermal flow sensor with thin-film thermocouples

摘要

A micro-thermal flow sensor is developed using thin-film thermocouples as temperature sensors. A micro-thermal flow sensor consists of a heater and thin-film thermocouples which are deposited on a quartz wafer using stainless steel masks. Thin-film thermocouples are made of standard K-type thermocouple materials. The mass flow rate is measured by detecting the temperature difference of the thin-film thermocouples located in the upstream and downstream sections relative to a heater. The performance of the micro-thermal flow sensor is experimentally evaluated. In addition, a numerical model is presented and verified by experimental results. The effects of mass flow rate, input power, and position of temperature sensors on the performance of the micro-thermal flow sensor are experimentally investigated. At low values, the mass flow rate varies linearly with the temperature difference. The linearity of the micro-thermal flow sensor is shown to be independent of the input power. Finally, the position of the temperature sensors is shown to affect both the sensitivity and the linearity of the micro-thermal flow sensor.