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首页> 外文期刊>Journal of Micromechanics and Microengineering >Rapid fabrication of microfluidic chips based on the simplest LED lithography
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Rapid fabrication of microfluidic chips based on the simplest LED lithography

机译:基于最简单的LED光刻技术快速制造微流控芯片

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Microfluidic chips are generally fabricated by a soft lithography method employing commercial lithography equipment. These heavy machines require a critical room environment and high lamp power, and the cost remains too high for most normal laboratories. Here we present a novel microfluidics fabrication method utilizing a portable ultraviolet (UV) LED as an alternative UV source for photolithography. With this approach, we can repeat several common microchannels as do these conventional commercial exposure machines, and both the verticality of the channel sidewall and lithography resolution are proved to be acceptable. Further microfluidics applications such as mixing, blood typing and microdroplet generation are implemented to validate the practicability of the chips. This simple but innovative method decreases the cost and requirement of chip fabrication dramatically and may be more popular with ordinary laboratories.
机译:微流体芯片通常通过采用商业光刻设备的软光刻方法来制造。这些重型机器需要关键的房间环境和高功率的灯,并且对于大多数普通实验室而言,其成本仍然过高。在这里,我们介绍了一种新颖的微流控制造方法,该方法利用便携式紫外线(UV)LED作为光刻的替代紫外线源。使用这种方法,我们可以像使用这些常规的商用曝光机一样重复几个常见的微通道,事实证明通道侧壁的垂直度和光刻分辨率都是可以接受的。进一步的微流控应用,例如混合,血液分型和微滴生成,可以验证芯片的实用性。这种简单但创新的方法大大降低了芯片制造的成本和要求,在普通实验室中可能会更受欢迎。

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