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Modulated photoluminescence studies for lifetime determination in amorphous-silicon passivated crystalline-silicon wafers

机译:调制光致发光研究,用于确定非晶硅钝化晶体硅晶片的寿命

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摘要

A simple, inexpensive method for characterization and quality control of silicon wafers and wafer coatings is proposed, based on the measurement of the complex frequency response of the photoluminescence signal to a sinusoidal excitation, which we term modulated photoluminescence. The minority carrier lifetime may be extracted directly from the phase information without the need for difficult and often imprecise intensity calibrations. We apply modulated photoluminescence measurements to study the influence of interface defects on the recombination of excess carriers in crystalline silicon wafers with different passivation schemes. (c) 2006 Elsevier B.V. All rights reserved.
机译:基于光致发光信号对正弦激励的复频响应的测量,我们提出了一种简单,廉价的表征和控制硅晶片和晶圆涂层的方法,我们称其为调制光致发光。少数载流子寿命可以直接从相位信息中提取,而无需进行困难且通常不精确的强度校准。我们应用调制的光致发光测量来研究界面缺陷对具有不同钝化方案的晶体硅晶片中过量载流子复合的影响。 (c)2006 Elsevier B.V.保留所有权利。

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