Sub-surface mechanical damage distributions during grinding of fused silica

摘要

The distribution and characteristics of surface cracking (i.e., sub-surface damage or SSD) formed during standard grinding processes have been measured on fused silica glass using a surface taper polishing technique. The measured SSD depth distributions are described by a single exponential followed by an asymptotic cutoff in depth. The observed surface cracks are characterized as near-surface lateral and deeper trailing indent type fractures (i.e., chatter marks). The length of the trailing indent is strongly correlated with a given grinding process. It is shown that only a small fraction of the abrasive particles are being mechanically loaded and causing fracture, and most likely it is the larger particles in the abrasive particle size distribution that bear the higher loads. The SSD depth increased with load and with a small amount of larger contaminant particles. Using a simple brittle fracture model for grinding, the SSD depth distribution has been related to the SSD length distribution to gain insight into 'effective' size distribution of particles participating in the fracture. Both the average crack length and the surface roughness were found to scale linearly with the maximum SSD depth. These relationships can serve as useful rules-of-thumb for non-destructively estimating SSD depth and for identifying the process that caused the SSD. Published by Elsevier B.V.