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Controllable preparation of patterns of aligned carbon nanotubes on metals and metal-coated silicon substrates

机译:可控地制备金属和金属涂覆的硅基底上的取向碳纳米管的图案

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摘要

Patterns and alignment of carbon nanotubes (CNTs) are particularly important for fabricating functional devices such as field emitters, scanning probes, sensors, and nanoelectronics. In this paper, the effects of various metal substrates on CNT growth are studied. Depending on the different growth mechanisms associated with the various substrate surfaces, two- or three-dimensional micropatterns of aligned carbon nanotubes have been prepared via pyrolysis of iron(II) phthalocyanine. Patterns created on silicon substrates were obtained by photolithographic techniques. The prepared CNT patterns have resolutions down to the micrometer scale. Possible growth mechanisms of aligned carbon nanotubes on different metal surfaces are also discussed. [References: 26]
机译:碳纳米管(CNT)的图案和排列对于制造功能器件(例如场发射器,扫描探针,传感器和纳米电子器件)特别重要。在本文中,研究了各种金属基底对CNT生长的影响。取决于与各种基材表面相关的不同生长机理,已通过热解酞菁铁(II)制备了取向碳纳米管的二维或三维微图案。通过光刻技术获得在硅衬底上产生的图案。所制备的CNT图案的分辨率低至微米级。还讨论了在不同金属表面上排列的碳纳米管可能的生长机理。 [参考:26]

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