Growth of diamond at the atmospheric pressure of hydrogen and methane by a hot-filament technique

摘要

Diamond is a unique material for innumerable applications because of its unusual combination of physical and chemical properties. Diamond has the highest thermal conductivity, the highest molar density, the highest hardness, and lowest compressibility of any known material. It has high Young's modulus, high electrical resistivity, high Johnson's and Keye's figures of merit, a wide band gap, a wide optical transparency; it is chemically very inert, has a high breakdown strength, a high electron and hole mobility [1,2]. Therefore, several potential applications can be anticipated in electronics, optics and protective coatings. Diamond thin films can be grown on a substrate using a reaction mixture with a limited concentration range of methane (up to 5%) in hydrogen. Good quality diamond films have been grown using < 1 % methane in hydrogen at a pressure of 39-52 Pa [3, 4].