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首页> 外文期刊>Journal of Materials Science >CHARACTERIZATION OF HYPERVELOCITY IMPACT CRATERS ON CHEMICAL VAPOUR-DEPOSITED DIAMOND AND DIAMONDLIKE CARBON FILMS
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CHARACTERIZATION OF HYPERVELOCITY IMPACT CRATERS ON CHEMICAL VAPOUR-DEPOSITED DIAMOND AND DIAMONDLIKE CARBON FILMS

机译:化学气相沉积金刚石和类金刚石薄膜的超高速冲击速率的表征

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Microwave plasma chemical vapour-deposited (CVD) process has been used to grow polycrystalline diamond films over silicon substrates. Diamond-like carbon (DLC) thin films were grown over silicon substrates using a microwave plasma disc reactor. Reactant gases of CH4 and H-2 were used in both CVD processes. Some preliminary feasibility tests were performed on the possible applicability of diamond and diamond-like carbon thin films for space-protective applications against artificially simulated electrically actuated plasma drag hypervelocity impact of olivine particles. As-deposited films were analysed by Raman for their chemical nature. The morphology and dimensions of hypervelocity impact craters in diamond and DLC films was also studied by scanning electron microscopy (SEM) and optical microscopy. The velocity of debris particles was determined by high-speed photography using a streak camera. The size of the impact particles was determined by measuring the size of the holes formed in the mylar sheet mounted just above the target diamond and DLC film;silicon and coordinates of the impact sites were determined using the same apparatus. [References: 18]
机译:微波等离子体化学气相沉积(CVD)工艺已用于在硅基板上生长多晶金刚石膜。使用微波等离子圆盘反应器在硅基板上生长类金刚石碳(DLC)薄膜。在两种CVD工艺中均使用CH4和H-2的反应气体。针对金刚石和类金刚石碳薄膜在空间保护性应用中抵抗人造橄榄石颗粒的人工模拟电致等离子体阻力超高速撞击的可能适用性,进行了一些初步的可行性测试。拉曼分析了沉积薄膜的化学性质。还通过扫描电子显微镜(SEM)和光学显微镜研究了金刚石和DLC膜中超高速撞击坑的形态和尺寸。碎片颗粒的速度是使用条纹相机通过高速摄影确定的。冲击颗粒的尺寸是通过测量安装在目标金刚石和DLC膜正上方的聚酯薄膜片中形成的孔的尺寸来确定的;使用相同的设备确定冲击部位的硅和坐标。 [参考:18]

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