Application of Plasma Cleaning for Plating Pretreatment

摘要

Pretreatment process is very important in plating process because failure of deposits almost comes from inadequate pretreatment. Recently, in leadframe manufacturing, plasma is used for metal cleaning and modification of polymeric materials. In this study we investigated a possibility of plasma pretreatment for coating technology. Plasma pretreatment was performed for pretreatment in vacuum chamber using Ar and H_2 gas. Specimens were prepared with copper plate. Then, specimens were plated in Ni sulfamate bath using DC and pulse current. To prevent reoxidation of speciemens, plating was conducted immediatly alter pretreatment. The surface morphology and roughness were examined by AFM, SEM. And surface residual oxide was investigated with XRD. Also adhesion test was performed by acoustic emission. In the test results optimum gas ratio was 1(Ar) : 4(H_2).