Combined ozone/HF/HCl based cleaning and adjusted emitter etch-back for silicon solar cells

Moldovan A.; Birmann K.; Rentsch J.; Zimmer M.; Gitte T.; Fittkau J.

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Combined ozone/HF/HCl based cleaning and adjusted emitter etch-back for silicon solar cells

机译：结合臭氧/ HF / HCl清洗和可调整的发射极回蚀，可用于硅太阳能电池

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《Diffusion and Defect Data. Solid State Data, Part B. Solid State Phenomena》 |2013年第null期|共5页
作者
Moldovan A.; Birmann K.; Rentsch J.; Zimmer M.; Gitte T.; Fittkau J.;
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正文语种 eng
中图分类半导体物理学;
关键词
Etch amount; Ozone; Selective emitter; Sheet resistance change;

机译：蚀刻量;臭氧;选择性发射极;板料电阻变化;

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1. Combined ozone/HF/HCl based cleaning and adjusted emitter etch-back for silicon solar cells [J] . Moldovan A., Birmann K., Rentsch J., Diffusion and Defect Data. Solid State Data, Part B. Solid State Phenomena . 2013,第Null期

机译：结合臭氧/ HF / HCl清洗和可调整的发射极回蚀，可用于硅太阳能电池
2. Combined ozone/HF/HCl based cleaning and adjusted emitter etch-back for silicon solar cells [J] . Moldovan A., Birmann K., Rentsch J., Diffusion and Defect Data. Solid State Data, Part B. Solid State Phenomena . 2013,第Null期

机译：结合臭氧/ HF / HCl清洗和可调整的发射极回蚀，可用于硅太阳能电池
3. Improved Surface Passivation by Wet Texturing, Ozone-Based Cleaning, and Plasma-Enhanced Chemical Vapor Deposition Processes for High-Efficiency Silicon Heterojunction Solar Cells [J] . Anna Belen Morales-Vilches, Er-Chien Wang, Tobias Henschel, Physica status solidi . 2020,第4期

机译：通过湿法制绒，基于臭氧的清洁和等离子增强化学气相沉积工艺改善了高效硅异质结太阳能电池的表面钝化
4. Combined ozone/HF/HCl based cleaning and adjusted emitter etch-back for silicon solar cells [C] . Anamaria Moldovan, Katrin Birmann, Jochen Rentsch, International symposium on ultra clean processing of semiconductor surfaces . 2013

机译：结合臭氧/ HF / HCl清洗和调整后的发射极回蚀，可用于硅太阳能电池
5. Development and optimization of high-efficiency thin-film silicon based solar cells using VHF PECVD techniques. [D] . Cao, Xinmin. 2008

机译：使用VHF PECVD技术开发和优化高效薄膜硅基太阳能电池。
6. Improving the efficiency of rear emitter silicon solar cell using an optimized n-type silicon oxide front surface field layer [O] . Sangho Kim, Jinjoo Park, Pham Duy Phong, -1

机译：使用优化的n型氧化硅正面场层提高后发射极硅太阳能电池的效率
7. Etch-Back Silicon Texturing for Light-Trapping in Electron Beam Evaporated Thin-Film Polycrystalline Silicon Solar Cells [O] . Wang Qian, Soderstrom Thomas, Omaki Kazuo, 2012

机译：用于电子束蒸发薄膜多晶硅太阳能电池中光阱的刻蚀硅纹理化
8. Hydrogenated Amorphous Silicon Emitter and Back-Surface-Field Contacts for Crystalline Silicon Solar Cells [R] . Wang, T. H., Iwaniczko, E., Page, M. R., 2005

机译：晶体硅太阳能电池的氢化非晶硅发射极和背面场接触

Combined ozone/HF/HCl based cleaning and adjusted emitter etch-back for silicon solar cells

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