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首页> 外文期刊>Journal of Electronic Materials >Solid-State Reaction in an Au Wire Connection with an AI-Cu Pad During Aging
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Solid-State Reaction in an Au Wire Connection with an AI-Cu Pad During Aging

机译:老化过程中与AI-Cu垫的Au导线连接中的固态反应

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In integrated-circuit packages,wire-bonding techniques are the preferred methods for making electrical connections between the chip and the lead frame.The influence of aging at 150deg C up to 3,000 hr on interfacial reactions of Au wire bonded with the Al-Cu pad was investigated herein.To observe various intermetallic compounds (IMCs) with field-emission scanning electron microscopy,polished samples were ion-milled through precision etching and coating techniques.Three IMCs,i.e.,(Al,Cu)Au_4,(Al,Cu)_3Au_8,and (Al,Cu)Au_2,were found between the Au wire and the Al-Cu pad in the as-assembled wire bond.After 168 hr of aging,Al_3(Au,Cu)_8 formed between (Al,Cu)_3Au_8 and (Al,Cu)Au_2 in the center of the wire bond.In fact,the Al-Cu pad,(Al,Cu)Au_2,and Al_3(Au,Cu)_8 IMCs were completely reacted after 500 hr of aging.(Al,Cu)_3Au_8 was thus transformed into (Al,Cu)Au_4.Near the edge of the wire bonds,(Al,Cu)Au_2 formed between the Al-Cu pad and (Al,Cu)_3Au_8 during 500 hr of aging.For aging longer than 1000 hr,Al_3(Au,Cu)_8 was detected between (Al,Cu)_3Au_8 and (Al,Cu)Au_2.It was noted that the Al_3(Au,Cu)_8 IMC gradually grew with aging.With the aid of microstructure evolution and quantitative analysis,the interfacial phase transformation between the Au wire and the Al-Cu pad could be probed.In addition,the growth kinetics of (Al,Cu)Au_4 and (Al,Cu)_3Au_8 in the center of wire bonds were also evaluated and discussed.
机译:在集成电路封装中,引线键合技术是在芯片和引线框架之间建立电连接的首选方法。在150°C下长达3,000小时的时效对键合到Al-Cu焊盘上的Au线的界面反应的影响为了研究各种金属间化合物(IMC)的场发射扫描电子显微镜,抛光后的样品通过精密蚀刻和涂层技术进行离子铣削。(IM,Al,Cu)Au_4,(Al,Cu)在组装好的引线键合中,在金线和铝-铜焊盘之间发现了_3Au_8和(Al,Cu)Au_2。老化168小时后,(Al,Cu)之间形成了Al_3(Au,Cu)_8 _3Au_8和(Al,Cu)Au_2位于焊线的中心。实际上,Al-Cu垫,(Al,Cu)Au_2和Al_3(Au,Cu)_8 IMC在老化500小时后完全反应。 (Al,Cu)_3Au_8转变为(Al,Cu)Au_4。在焊线边缘附近,在500小时的时效过程中,在Al-Cu焊盘和(Al,Cu)_3Au_8之间形成的(Al,Cu)Au_2老化时间长在1000小时内,在(Al,Cu)_3Au_8和(Al,Cu)Au_2之间检测到Al_3(Au,Cu)_8.Al_3(Au,Cu)_8 IMC随着年龄的增长逐渐增长。微观组织演化和定量分析的结果,可以探测金丝与铝铜垫之间的界面相变。此外,(Al,Cu)Au_4和(Al,Cu)_3Au_8在丝中心的生长动力学债券也进行了评估和讨论。

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