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首页> 外文期刊>Journal of Electronic Materials >Fluxless Tin and Silver-Indium Bonding Processes for Silicon onto Aluminum
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Fluxless Tin and Silver-Indium Bonding Processes for Silicon onto Aluminum

机译:铝上硅的无助焊剂锡和银铟键合工艺

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摘要

The high thermal conductivity, light weight, and low cost of aluminum (Al) make it a promising material for use in high-power electronic packaging. The challenges are its high coefficient of thermal expansion (CTE) of 23 × 10~(-6)/℃ and difficulty in soldering. In this research, we surmounted these challenges by bonding large Si chips to Al boards using fluxless Sn and Ag-In processes, respectively. Despite the large CTE mismatch, the bonded structures were strong as determined by fracture force measured by shear test machine. The reference is the fracture force specified in MIL-STD-883H method 2019.8. The microstructure and composition of the joints were examined using scanning electron microscopy (SEM) and energy-dispersive x-ray (EDX) analysis. The resulting Sn joint is almost pure Sn with thin intermetallic layer. The Ag-In joint consists of Ag/(Ag)/Ag_2In/(Ag)/Ag that has a melting temperature higher than 695℃ even though the bonding process was performed at 180℃. These bonding processes are entirely fluxless. The fluxless feature greatly helps reduce voids in the joints, which in turn increases the joint strength. These preliminary but encouraging results should open up new applications of Al boards in electronic packaging where Al was avoided because of its high CTE and difficulty in bonding.
机译:铝(Al)的高导热性,重量轻和低成本使其成为用于大功率电子封装的有前途的材料。挑战在于其23×10〜(-6)/℃的高热膨胀系数(CTE)和焊接困难。在这项研究中,我们通过分别使用无助熔剂Sn和Ag-In工艺将大型Si芯片粘合到Al板上来克服这些挑战。尽管存在很大的CTE失配,但通过剪切试验机测得的断裂力可以确定其结合结构牢固。参考是MIL-STD-883H方法2019.8中指定的断裂力。使用扫描电子显微镜(SEM)和能量色散X射线(EDX)分析检查了接头的微观结构和成分。所得的Sn接头几乎是具有薄金属间层的纯Sn。 Ag-In接头由Ag /(Ag)/ Ag_2In /(Ag)/ Ag组成,即使在180℃下进行键合,其熔点仍高于695℃。这些键合过程完全无助焊剂。无助焊剂功能极大地减少了接头中的空隙,从而增加了接头强度。这些初步但令人鼓舞的结果应开辟铝板在电子包装中的新应用,其中铝由于其较高的CTE和粘合困难而被避免。

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