Pb(Mg{sub}(1/3)Nb{sub}(2/3))Ti{sub}0.03O{sub}3 ferroelectric thin films, deposited by laser ablation on TiN bottom electrodes

摘要

Pb(Mg{sub}(1/3)Nb{sub}(2/3)){sub}0.97Ti{sub}0.03O{sub}3 (PMNT) polycrystalline thin films were deposited on Titanium Nitride electrodes at different temperatures by laser ablation, using a wavelength of 248 nm. The morphology of the films was analyzed by scanning electron microscopy (SEM). The nature of the ferroelectric layer-electrode interface is studied by transmission electron microscopy (TEM) as well as the effect of its characteristics in the performance of the multilayer system. The influence of the annealing temperature on the dielectric properties was studied by hysteresis and fatigue measurements.