Feedback mode-based electrochemical imaging of conductivity and topography for large substrate surfaces using an LSI-based amperometric chip device with 400 sensors

摘要

Feedback mode-based electrochemical imaging of conductivity and topography for large substrate surfaces is presented using a large-scale integration (LSI)-based amperometric chip device with 400 sensors at a pitch of 250 lam. The LSI-based chip device has enabled rapid electrochemical imaging of large substrate surfaces, compared to scanning electrochemical microscope (SECM). Substrates modified with conductive and insulating materials were placed onto the device to acquire electrochemical signals from the substrate surface using positive and negative feedback signals. The conductivity and topography of the substrate were successfully imaged, indicating that the feedback mode-based electrochemical imaging with such a device is useful to characterize large-area substrate surfaces. (C) 2015 Elsevier B.V. All rights reserved.