Mechanics of adhesion in MEMS-a review

摘要

A review is presented o fthe mechanics of microscale adhesion in microelectromechanical systems(MEMS).Some governing dimensionless numbers such as Tabor number,adheson parameter and peel number for microscale elastic adhesion contact are discussed in detail.The peel number is modified for the elastic contactbetween arough surfacein contact with a smooth plane.Roughness ratio is introducedto characterize the relative importance of surface roughness for microscale adhesion contact,and threekinds of asperity height distributiosnarediscussed:Gaussian,fractal,and exponential distributions.Both Gaussian and exponential distriutions are found to be special casesof fractal distribution.Casimir forceinduced adhesion inMEMS,and adheson of carbon nanotubesto a substrte arealso discussed.Finally,microscale plastic adhesion contact theory is briefly reviewed,and it is foudn that the dimensionless number,lasticity index fo various forms,can be expressed by the roughness ratio.