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Ultrasonic characterization of the interface between a die attach adhesive and a copper leadframe in IC packaging

机译:IC封装中管芯粘胶和铜引线框架之间的界面的超声表征

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摘要

The silicon die (chip) and the copper leadframe in IC packaging are bonded by a die attach adhesive, and the quality of the interface is a critical issue in the reliability of IC packaging as well as during the manufacturing process. The common defects such as cracks and delamination can be detected using the C-mode scanning acoustic microscopy. However, a weak interface due to poor adhesion often goes undetected and may become a potential defective area at a later stage. This paper describes the work done to evaluate the quality of the weak interface between a die attach adhesive and a copper leadframe. An interface spring model is used to predict the ultrasonic reflection coefficients. Normal incidence reflection coefficients are measured from a two-layer specimen bonded with a die attach adhesive. The quality of the interface in the samples and its degradation are affected by copper oxidation, and by applying shear stress loading. It is shown that the reflection coefficient depends strongly on both the interface quality and stress loading, indicating that a nondestructive characterization of the interface is possible and the reflection coefficient can be used as a criterion.
机译:IC封装中的硅芯片(芯片)和铜引线框架通过芯片连接粘合剂粘合在一起,并且接口的质量是IC封装可靠性以及制造过程中的关键问题。常见的缺陷,例如裂缝和分层,可以使用C模式扫描声显微镜进行检测。然而,由于粘附力差而导致的弱界面经常未被发现,并且在稍后阶段可能成为潜在的缺陷区域。本文介绍了为评估芯片连接粘合剂和铜引线框架之间的弱界面质量而进行的工作。界面弹簧模型用于预测超声反射系数。法向入射反射系数是从用芯片连接胶粘剂粘合的两层样品中测得的。样品中界面的质量及其降解受铜氧化和施加切应力负荷的影响。结果表明,反射系数在很大程度上取决于界面质量和应力负荷,这表明界面的无损表征是可能的,并且反射系数可以用作判据。

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