Observation of structural changes in carbon films under external influences

摘要

Carbon films obtained by the plasma chemical deposition method from the multicomponent stream of ionized particles on the various substrates are investigated. Structural formations with parallel lines were observed under the microscope on the film surface. Apparently, charge accumulation takes place along these lines. When the film locally is heated then micro tube-like structure peculiarities are formed along these lines. Observed peculiarities are periodic in nature with well-established formation phases. Possibly, the charge accumulation lines coincide with the micro tube-like formations as our observations revealed. It is important to stress that the parameters of micro tube-like formations, i.e., the period of sinus-like formations and their linear dimensions are dependent on the technological parameters. Metal-carbon film-Si sandwich-like system's volt-ampere characteristics show irreversible breakdown due to structural changes taking place in system and being observed microscopically. Obviously, this is due to applied strong electric fields (approx 10~3-10~6 V/cm). Thus, origination of micro- and nano-formations both on the surface and in the bulk of carbon films under strictly controlled conditions is possible to obtain from multicomponent ion streams.