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Hot filament CVD diamond coating of TiC sliders

机译:TiC滑块的热丝CVD金刚石涂层

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摘要

Hot filament chemical vapour deposition (HF CVD) process with low filament temperature (approx 1650 deg C) was utilized for the diamond coating of TiC samples. Porous substrates were fabricated by pulse discharge sintering (PDS) to create more nucleation sites. Nucleation density and morphology of deposited diamond films were studied using scanning electron microscopy (SEM). It was found that the highest growth rate occurs at substrate temperature of 980 deg C. Evaluation of the residual stress in deposited films was carried out by Raman spectroscopy. Ball on disk tests were performed with steel as a counterface material. After polishing diamond films demonstrated good sliding performance: friction coefficient of 0.08 and wear rate of 10~(-17) m~3/N m.
机译:TiC样品的金刚石涂层采用低灯丝温度(约1650摄氏度)的热丝化学气相沉积(HF CVD)工艺。通过脉冲放电烧结(PDS)制造多孔基材,以产生更多的成核位置。使用扫描电子显微镜(SEM)研究了沉积的金刚石薄膜的成核密度和形态。发现最高的生长速率发生在基板温度为980℃下。通过拉曼光谱法对沉积膜中的残余应力进行评估。使用钢作为对面材料进行圆盘测试。抛光后的金刚石薄膜表现出良好的滑动性能:摩擦系数为0.08,磨损率为10〜(-17)m〜3 / N m。

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