Diamond electro-mechanicalmicro devices-technology and performance

摘要

For Mikro Electro Mechanicla Systems (MEMS)based on chemical vapour deposition (CVD) diamond many key stps in growth and processing have been developed and work reliably.Devices can be tailored dpending on their specific application.Static and dynamic perofrmance data become avaiable as specifically discussed for the electromechanical microrelay.However,although steady progress is observed the variety of devices is still limited and a number of key elements still needs to be developed for systems including fully free moving parts.