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High-current electron emission of thin diamond films deposited on molybdenum cathodes

机译:沉积在钼阴极上的金刚石薄膜的高电流电子发射

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摘要

The results of investigation of emission characteristics of cold cathodes employing diamond and related films are presented. The films were deposited in a new millimeter wave plasma-assisted CVD reactor using Ar-H_2-CH_4 and Ar-H_2-CH_4-N_2 gas mixtures. To study the emission properties of the high-current cathodes they were subjected to -50 ns high-voltage pulses with amplitudes up to 100 kV. Experiments show that the emission properties strongly depend on methane and nitrogen concentration in gas mixture. The homogeneous emission with current density of 220 A/cm2 has been obtained. The prepared cathodes were successfully tested in high-power rf pulse compressor employing electron beam triggering.
机译:给出了研究采用金刚石和相关膜的冷阴极发射特性的结果。使用Ar-H_2-CH_4和Ar-H_2-CH_4-N_2气体混合物将膜沉积在新的毫米波等离子体辅助CVD反应器中。为了研究高电流阴极的发射特性,它们经受了幅度高达100 kV的-50 ns高压脉冲。实验表明,排放特性很大程度上取决于混合气体中甲烷和氮气的浓度。已获得电流密度为220 A / cm2的均匀发射。制备的阴极已在采用电子束触发的大功率射频脉冲压缩机中成功测试。

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