Real time calibration for ultrasensitive leak detection

摘要

A variable reference leak rate system is developed for real time calibration of ultrasensitive leak detection. It is based on the molecular flow characteristics of the platinum wire-glass leak element combined with a helium pressure adjustable device. Helium reference leak rate range from 10(-14) to 10(-10) Pa m(3)/s is provided and has been used for real time calibration of ultrasensitive mass spectrometer leak detection system. (c) 2006 Elsevier Ltd. All rights reserved.