MEMS sensors, also for geodesy [MEMS-Sensoren, auch für die Geod?sie]

摘要

The detection of states of motion is carried out by a combination of various sensors, usually accelerometers, gyroscopes and additional GPS measurements. The conventional sensors tend to be replaced by miniaturized, low-cost sensors socalled Micro Electro Mechanical Systems (MEMS). MEMS can be found in airbags and tyre systems, digital cameras, mobile phones, print heads of inkjet printers, cardiac pacemakers and biochips for DNA analysis. These systems include sensors, actuators and electronics, and are produced in micro size - from 1 mm to 1 μm - using the material and manufacturing processes of microelectronics. This paper focuses on the definition of MEMS, the application fields of MEMS, the aspect of miniaturization, the explanation of the physical principles, the acceleration and rotation rate sensors increasingly used in geodesy and the application of the detection of movement states using accelerometers.